| Title: |
Scanning Electron Microscopy |
| Model: |
Vega TS 5130 MM |
| Manufacturing company: |
TESCAN s.r.o. |
| Year of manufacture: |
2002 |
| Type: |
Analytical and measuring instruments |
| Contact/responsible person email address: |
gbadalyan@mail.ru |
| Technical description: |
Magnification: 15x to 100 000x, 500 000x for special samples
Resolution (lateral): 10-50 nm, 3,5 nm for special samples
Resolution (depth): 1-10 nm (SE detector), 10-1000nm (BSE detector)
Electron gun: tungsten heated cathode
Probe current: 1pA to 2mkA
Working vacuum: 5x10-3 Pa |
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